South Korean Semiconductor fabs have been installed the ETG uVOC CAM to Airborne Molecular Contamination in their Clean Room
Samsung, Hynix and Fairchild are using the ETG uVOC CAM to monitor the Airborne Molecular Contamination in their Clean Room.
The ETG uVOC CAM detect continuously VOC (speciate) up to 16 sampling points with a detection limit of 0,1 ppb.
uVOC-CAM it’s a GC-FID based technology with a direct reading of the detected compound as well their concentration as:
2-Butanone,Trymethyl.silanol ,Acetone, Ethanol, Isopropanol,Cyclohexane,Ethyl Lactate,N-Hexane,Ethyl benzene,Butanol, Butylacetate, M,p xylene, Styrene,Benzene,Toluene, HMDS, PGMEA and many others.
The GC technology it’s the most suitable when complex molecules must to shared and identified.
This method it’s based on the chromatography technology and using a special GC column related to the electrical conductivity of each compound absorbed by a Flame Ionization detector (supplied by a flow of mixture Air/H2) allow the detection of very small concentration of organic compound.
The system include , in addition to the GC-FID, an automatic sampling system up to 16 channels, H2 generator, On board calibrator, PC and Software based on HMI interface.
Most important applications of the uVOC-CAM are : Semiconductors (VOC chemical filters monitoring), Medical air contamination survey, Research Institute on Environmental study or Automotive, etc..