Real-time monitoring of airborne contamination has become critically important in semiconductor processing.
The industry requirements include rapid detection and alarm, very low level concentration monitoring, wide area sampling, and sensitivity to many different gases.
The ETG New Orion 3100 provide both the sensitivity and speed needed for the most demanding trace contaminant monitoring applications. Delivering continuous measurements with parts per trillion (ppt) sensitivity, ETG ORION 3100 it’s ideal for semiconductor manufacturing applications, including airborne molecular contamination (AMC) cleanroom monitoring.
ORION 3100 for ammonia, HCl, HF trace detection combined with uVOC-CAM ( speciate Volatile Organic Compounds ) features the most powerful tools on the semi market for airborne molecular contamination in clean room.
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